| dc.contributor.advisor | Lionel C. Kimerling. | en_US |
| dc.contributor.author | Liao, Ling | en_US |
| dc.date.accessioned | 2005-08-18T23:02:29Z | |
| dc.date.available | 2005-08-18T23:02:29Z | |
| dc.date.copyright | 1997 | en_US |
| dc.date.issued | 1997 | en_US |
| dc.identifier.uri | http://hdl.handle.net.ezproxyberklee.flo.org/1721.1/10230 | |
| dc.description | Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1997. | en_US |
| dc.description | Includes bibliographical references (leaves 106-109). | en_US |
| dc.description.statementofresponsibility | Ling Liao. | en_US |
| dc.format.extent | 109 leaves | en_US |
| dc.format.extent | 8978042 bytes | |
| dc.format.extent | 8977801 bytes | |
| dc.format.mimetype | application/pdf | |
| dc.format.mimetype | application/pdf | |
| dc.language.iso | eng | en_US |
| dc.publisher | Massachusetts Institute of Technology | en_US |
| dc.rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. | en_US |
| dc.rights.uri | http://dspace.mit.edu.ezproxyberklee.flo.org/handle/1721.1/7582 | |
| dc.subject | Materials Science and Engineering | en_US |
| dc.title | Low loss polysilicon waveguides for silicon photonics | en_US |
| dc.type | Thesis | en_US |
| dc.description.degree | M.S. | en_US |
| dc.contributor.department | Massachusetts Institute of Technology. Department of Materials Science and Engineering | |
| dc.identifier.oclc | 38509198 | en_US |
